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Semiconductor Equipment/Fab/Marketing:
1016 Expert is a professional engineer with experience in execution of engineering programs. He has completed complex product development programs on schedule and within budget while directing a few engineers to multi-disciplinary teams of 50 or more. He has successfully completed several major, highly technical development programs in the semiconductor equipment industry. His industry knowledge includes front-end equipment with Epi, CVD, Etch, PVD, and CMP processes, and metrology equipment including optical tools used for CD, defect and film analyses. He has design experience with high reliability mechanisms, machine design and overall system architecture. He has two patents and has previous expert experience. He has expertise and is able to serve as an expert witness in the following: Semiconductor Equipment Design, New Product Program Management, Various semiconductor process application including Etch, CVD, CMP and Epi deposition, Various inspection equipment, Mechanisms Design for both atmospheric and vacuum application, Reliability of systems and components, Manufacturing and Supplier management, Risk Management, and Business Financial Health. 1031 Expert has a Ph.D. and has over 30 years of experience in the areas of lasers, nonlinear optics, nonlinear spectroscopy, and EUV lithography (formerly Soft X-ray Projection Lithography). His professional career achievements include being a Distinguished Member of the Technical Staff for AT&T Bell Laboratories, and Principal Scientist for Components Research at Intel Corporation. He has made numerous contributions to the field of optics and photonics in the following areas of research and development: nonlinear optics; single-mode, Q-switched ruby lasers; optical parametric oscillators; distributed-feedback lasers; self-trapping of light; doppler-free, two-photon spectroscopy; nonlinear optical spectroscopy; laser processing of materials; resonance-radiation pressure on atoms; optical cooling of atoms (first demonstration of “Optical Molasses”); optical trapping of atoms (first demonstration). Expert has been an author of over 110 scientific publications and has been issued 15 patents. He has previous experience as an expert witness. Most of the work he carried out at Intel in the field of photolithography was not published externally. He has expertise and is able to serve as an expert witness in the following: EUV, DUV, and Optical Lithographies, Visible and EUV Optics, Optical Cooling and Trapping of Atoms, Resonance-Radiation Pressure, Nonlinear Optics and Lasers, Optical Parametric Oscillators, Single-mode, Q-switched Ruby Lasers, Self-Trapping of Light, Two-Photon Spectroscopy, Distributed-Feedback Lasers, Nonlinear Optical Spectroscopy, and Laser Processing of Material. 1037 Expert has over 35 years of experience and is a senior semiconductor operations, engineering and facilities safety director. He has hands-on technical and management expertise in the specification, development and operations of clean rooms, microelectronics assembly, chemical, gas, gas safety, and alarm technologies. His manufacturing experience includes automatic testing & control and component electronics from IC/logic design to yield engineering, communications, and major computer systems. His previous positions include Director of Plant Engineering and Risk Management, Vice-President of Manufacturing Engineering, Director of Test and Assembly, and an endowed chair of Process Engineering for a new Microelectronics Proessing Engineering Program at a Silicon Valley university. Currently he consults and performs audits on technical operations, facilities, safety systems, and personnel selection. He has previous expert witness experience. He has expertise and is able to serve as an expert witness in the following: Automatic Testing and Control, Clean Room Design, Semiconductor Chemical Gas & Gas Safety Technology, Semiconductor Fab Operations, Semiconductor Facilities Management, and Semiconductor Yield Engineering. 1039 Expert has a Ph.D. in Electrical Engineering from Stanford University with over 20 years of research experience. He has been a Professor of Electrical Engineering and Computer Science and Group Leader for Extreme UV Lithography at a major California university for over 10 years. His research interests include: deep sub-micron silicon VLSI technology, fabrication, and device physics; Extreme ultraviolet (EUV) lithography; Optical metrology; Interferometry and Fourier optics; and ultrafast carrier dynamics in electronic materials. He previously worked at AT&T Bell Laboratories for 13 years as a researcher and group leader responsible for optical and laser science, and later for creating technologies relevant to silicon IC manufacturing for a horizon of the next ten years. His numerous major research accomplishments include development of small nanometer gate-length MOSFET devices and MOS devices fabricated with ultraviolet lithography. He has 3 patents and has prior expert witness experience from 8 previous engagements. He has expertise and is able to serve as an expert witness in the following: Device Physics, Nanotechnology, Laser Technology, Microchip Fabrication, Optics, Semiconductor Physics, Semiconductor Process, and VLSI Technology. 1178 Expert is a Ph.D. in Mechanical Engineering from Stanford University and has 20 years of experience in the areas of robotics, electromechanical engineering and product development. He holds 3 patents. He has worked for major automation and robotics manufacturers and research labs. His body of work includes handwriting and fingerprint recognition using neural networks and Hidden Markov Models, general (3D) object recognition system using neural networks, five degree-of-freedom micromanipulator, advanced concepts for EVA tools and robotic equipment, software simulation of commercial robots used for surface-mounting IC chips, specialized grippers and fixtures, and a robotic hand. He has previous expert witness experience. He has expertise and is able to serve as an expert witness in the following: Automated Control Systems, Digital and Analog Control Systems, Equipment Automation, Handwriting recognition, Mechanical Engineering, Neural Networks, Robotics, and Signal Processing. 1276 Expert is Physics Ph.D. and has broad experience and depth of expertise in the various processes, process sequences, associated equipment, and manufacturing process control systems essential to competitiveness in the semiconductor and also the broader microelectronics industry, including displays and microelectromechanical systems (MEMS). His current research includes new programs in biomaterials, biomedical MEMS, and combinatorial materials science, as well as ongoing work related to semiconductors (equipment, Si and GaN materials and processes, sensing, simulation, advanced process control, environmentally benign manufacturing) and to simulation-based learning systems for education and technical training. He is able to serve as an expert witness in the following: Semiconductor & microelectronics manufacturing, Materials & processes for semiconductor technology – Si, SiGe, GaN, Process integration & yield, Chemical vapor deposition – dielectrics, metals, semiconductors, Plasma etch & deposition, Advanced interconnect technology – Cu, low-K, Damascene, Real-time, in-situ chemical sensing, Metrology & advanced process controlProcess sequences & integration for CMOS, displays, and MEMS, Ultraclean & cluster tool processing, Advanced equipment design, Optical properties & sensors, Silicides, contacts, diffusion barriers, Packaging technology, soft materials, Modeling, simulation, & optimization, Hardware/software co-design, Biomaterials, MEMS & biotechnology, Surface, interface & thin film science. |
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