1276 Expert has a Ph.D. in Physics and has broad experience and depth of expertise in the various processes, process sequences, associated equipment, and manufacturing process control systems essential to competitiveness in the semiconductor and also the broader microelectronics industry, including displays and micro-electromechanical systems (MEMS). His current research includes new programs in biomaterials, biomedical MEMS, and combinatorial materials science, as well as ongoing work related to semiconductors (equipment, Si and GaN materials and processes, sensing, simulation, advanced process control, environmentally benign manufacturing) and to simulation-based learning systems for education and technical training. He is able to serve as an expert witness in the following: Semiconductor & microelectronics manufacturing, Materials & processes for semiconductor technology - Si, SiGe, GaN, Process integration & yield, Chemical vapor deposition - dielectrics, metals, semiconductors, Plasma etch & deposition, Advanced interconnect technology - Cu, low-K, Damascene, Real-time, in-situ chemical sensing, Metrology & advanced process control. Process sequences & integration for CMOS, displays, and MEMS, Ultraclean & cluster tool processing, Advanced equipment design, Optical properties & sensors, Silicides, contacts, diffusion barriers, Packaging technology, soft materials, Modeling, simulation, & optimization, Hardware/software co-design, Biomaterials, MEMS & biotechnology, Surface, interface & thin film science.
- Semiconductor & microelectronics manufacturing
- Materials & processes for semiconductor technology - Si, SiGe, GaN
- Process integration & yield
- Chemical vapor deposition - dielectrics, metals, semiconductors
- Plasma etch & deposition
- Advanced interconnect technology - Cu, low-K, Damascene
- Real-time, in-situ chemical sensing
- Metrology & advanced process control
- Process sequences & integration for CMOS, displays, and MEMS
- Ultraclean & cluster tool processing
- Advanced equipment design
- Optical properties & sensors
- Silicides, contacts, diffusion barriers
- Packaging technology, soft materials
- Modeling, simulation, & optimization
- Hardware/software co-design
- Biomaterials, MEMS & biotechnology
- Surface, interface & thin film science